针对MEMS火工品低能化带来的安全性问题,设计了一种MEMS安全起爆芯片,包括Ni-Cr微加热器层、绝缘层、导线控制层.采用共聚焦显微镜......

Surface Acoustic Wave (SAW) sensors and micro-electromechanical system (MEMS) technology provide a promising solution fo......